本标准为ISO 22493-2014，标准的英文名称为Microbeam analysis -- Scanning electron microscopy -- Vocabulary，本标准在2014-04-01发布，在2014-04-01开始实施。
ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate. ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.
本标准文件共有28页。
ISO 22493-2014 Microbeam analysis -- Scanning electron microscopy -- Vocabulary.pdf
(360.67 KB)
|
|
